BPN639: Fabrication of Nonlinear Wideband MEMS Energy Harvester with Vertical Sidewall Electrets


The goal of the project is to design and fabricate a wide band vibration energy harvester based on silicon MEMS fabrication technology. The project focuses on electrostatic conversion using vertical-sidewall electrets for biasing. Nonlinear springs are designed to operate the device in a wide vibration frequency range of 400 Hz – 1000 Hz at sufficiently high levels of acceleration. The fabrication of the energy harvester was performed at the Marvell Nanofabrication facility at UC Berkeley. The project is supported from the collaboration program between Vestfold University College - IMST (Norway) and UC Berkeley - BSAC and is funded by The Norwegian Centre for International Cooperation in Higher Education (SIU), contract No. MNA-2008/10004.

Project end date: 02/06/12

Son Duy Nguyen
Publication date: 
August 19, 2011
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2011

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