Richard M. White (Advisor)

High-Q Aluminum Nitride RF MEMS Lamb Wave Resonators and Narrowband Filters

Ernest Ting-Ta Yen
Albert P. Pisano
Clark T.-C. Nguyen
Liwei Lin
Richard M. White
2012

The increasing demands for higher performance, advanced wireless and mobile communication systems have continuously driven device innovations and system improvements. In order to reduce power consumption and integration complexity, radio frequency (RF) microelectromechanical systems (MEMS) resonators and filters have been considered as direct replacements for off-chip passive components. In this dissertation, a new radio architecture for direct channel selection is explored. The primary elements in this new architecture include a multitude of closely-spaced narrowband filters (...

Nam-Trung Nguyen

Alumni
Professor Richard M. White (Advisor)
PostDoc 1997-1998

Microfiltration and Flexural Plate Wave Devices

Pamela Caton
Richard M. White
2001

Current MEMS microfilter improvement is driven by the need to perform absolute separation of micron-sized particles from milliliter-scale uid volumes. Such filtration is an essential step in many biological and medical applications. For example, routine blood tests require separating blood plasma from whole blood. Using microfabrication techniques it has recently become possible to create integrated miniaturized fluid-handling devices. Promising applications include miniaturized systems for the filtration, fractionation, and manipulation of biological cells and DNA. Before such promise can...

Justin Black

Alumni
Electrical Engineering and Computer Sciences
Professor Richard M. White (Advisor)
Ph.D. 2006

MEMS-Based System for Particle Exposure Assessment Using Thin-Film Bulk Acoustic Wave Resonators and IR/UV Optical Discrimination

Justin Black
Richard M. White
2006

Airborne particulates are responsible for severe adverse effects on human health, examples being the lung disease caused by tobacco smoke and severeasthmatic reactions to certain other particulates. Present instrumentation to measure such particulates is bulky, costly to purchase, and difficult to operate; its use in field studies usually requires sending samples collected to an analytical laboratory in order to identify the particulates. This dissertation describes a...

A Micromachined Acoustic Immunosensor for the Detection of Breast Cancer Antigens

Amy Wang
Richard M. White
1997
We have developed an acoustic immunoassay that couples a mass-amplifying label with a silicon-micromachined gravimetric sensor, the Flexural Plate Wave (FPW) device. This assay has direct application to the diagnostic detection of a breast cancer antigen in the sera...

Micromachined Silicon Ultrasonic Longitudinal Mode Actuators: Theory and Applications to Surgery, Pumping, and Atomization

Amit Lal
Richard M. White
1996
A silicon-based high-intensity ultrasound actuator technology is developed. It is shown that silicon's high maximum ultrasonic particle velocity, high thermal conductivity, and low internal loss, make it an ideal resonator material for high-intensity ultrasonic actuators. Furthermore, it is expected that silicon micromachined batch...

Integrated-Circuit-Compatible Electret and Condenser Ultrasonic Transducers

Jonathan Bernstein
Richard M. White
1983
This dissertation presents research on the design, analysis and construction of thin film electret and condenser ultrasonic transducers which are compatible with integrated circuit fabrication. In addition, materials research is ...

Richard M. Moroney III

Alumni
Electrical Engineering and Computer Sciences
Professor Richard M. White (Advisor)
Ph.D. 1995

Ultrasonic Microtransport

Richard M. Moroney III
Richard M. White
1995
We have observed numerous kinetic effects using ultrasonic flexural plate waves (EPWs) in 4-um-thick composite plates of low-stress silicon nitride, piezoelectric zinc oxide and aluminum. The wavelength is typically 100 um, and the area 3 x 8...