BPN607: Long-Term Stability in MEMS-Based Oscillators


The objective of this project is to accurately determine long-term frequency stability (i.e. frequency aging) of small-gap capacitive micro-electro-mechanical (MEMS)-based oscillators. This will be accomplished by creating a measurement setup where the oscillator is in a completely stabilized environment, the resonator is hermetically sealed into a clean enclosure, a “burn-in” is completed step to pre-age the device, and other precautions are taken as necessary for a detailed study of the aging process.

Project end date: 02/05/12

Publication date: 
August 17, 2011
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2011

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