BPN590: QES: MEMS Polymer Infrared Sensor Array


This project's goal is to design, fabricate and test a MEMS, polymer-based, un-cooled thermal infrared (IR) sensor array. The sensors will be based on polymer-ceramic bimorph (two-layer) beams. Absorption of the incident IR radiation by each bimorph cantilever beam raises its temperature, resulting in proportional deflection due to the mismatch in thermal expansion of the two bimorph materials.

Project end date: 08/16/11

Publication date: 
February 18, 2011
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2011

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