New resonator structural materials will be explored to achieve GHz-frequency MEMS resonators having ultra-high quality factors (Q's) and antenna-amenable motional impedances. Materials having acoustic velocities greater than that of polysilicon, such as diamond and silicon carbide (SiC), will be used to fabricate devices having higher resonance frequencies and higher Q's than their polysilicon counterparts. Low-loss metals, including metal alloys, will be investigated to achieve low deposition temperatures and high electrical conductivities while nonetheless maintaining high Q's. Post-processing techniques such as localized annealing will be investigated to improve Q's.
Project end date: 08/15/12