BPN541: High-Voltage MEMS Resonators


The use of high voltages (>100 volts) in MEMS-based resonators presents a pathway towards achieving low motional resistances while maintaining excellent linearity, as would be required, for example, in a MEMS-based power amplifier. This research demonstrates the feasibility of creating MEMS resonators which can withstand such voltages without succumbing to electrical pull-in, focusing on careful device design informed by FEM simulation.

Project end date: 02/01/11

Publication date: 
August 10, 2010
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2010

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