BPN540: Temperature-Stable Micromechanical Resonators and Filters


This project aims to suppress temperature-induced frequency shift in high frequency micromechanical resonators targeted for channel-select filter and oscillator applications. A novel electrical stiffness design technique is utilized to compensate for thermal drift, in which a temperature-dependent electrical stiffness counteracts the resonator’s intrinsic dependence on temperature caused mainly by Young’s modulus temperature dependence.

Project end date: 08/14/17

Publication date: 
August 14, 2017
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2017

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