This project aims to suppress temperature-induced frequency shift in high frequency micromechanical resonators targeted for channel-select filter and oscillator applications. A novel electrical stiffness design technique is utilized to compensate for thermal drift, in which a temperature-dependent electrical stiffness counteracts the resonator’s intrinsic dependence on temperature caused mainly by Young’s modulus temperature dependence.
Project end date: 08/14/17
August 14, 2017
BSAC Project Materials (Final/Archive)
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