BPN540: Temperature-Stable Micromechanical Resonators and Filters

This project aims to suppress temperature-induced frequency shift in high frequency micromechanical resonators targeted for channel-select filter and oscillator applications. A novel electrical stiffness design technique is utilized to compensate for thermal drift, in which a temperature-dependent electrical stiffness counteracts the resonator’s intrinsic dependence on temperature caused mainly by Young’s modulus temperature dependence.

Project end date: 08/14/17