Abstract:
The long-range goal of this project is to develop aluminum nitride (AlN) Lamb wave resonators with high Q, small frequency-temperature drift, multiple frequencies, and CMOS compatibility on one single chip.
Project end date: 08/16/13
Publication date:
January 30, 2013
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2013