BPN441: HEaTS: Temperature-Compensated & High-Q Aluminum Nitride Lamb Wave Resonators


The long-range goal of this project is to develop aluminum nitride (AlN) Lamb wave resonators with high Q, small frequency-temperature drift, multiple frequencies, and CMOS compatibility on one single chip.

Project end date: 08/16/13

Publication date: 
January 30, 2013
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2013

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