BPN432: Micromechanical Resonant Displacement Gain Stages


This overall project aims to apply mechanical displacement amplification for MEMS resonators to improve the performance of various analog and digital signal processors in RF MEMS devices. These performance benefits will be investigated by analytical models and numerical simulations as well as fabrication and experimental verification.

Project end date: 01/29/10

Publication date: 
August 11, 2009
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2009

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