Abstract:
This project aims to develop levitated ultra-high-Q micromechanical resonators based upon the principle of diamagnetism and/or electrostatics. These magnetic and electrostatic actuation schemes obviate the need for supports, thereby eliminating design-imposed anchor-to-substrate energy loss mechanisms and perhaps revealing the intrinsic Q of resonator materials. In addition, on-chip signal-conditioning circuitry will be developed and integrated together with resonators, providing precise control over the lateral position of the resonators.
Project end date: 01/28/10
Publication date:
August 10, 2009
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2009