BPN418: MEMS Poly/Nano: Polymer Coated Cantilevers for Infrared Heat Sensing


A polymer-polysilicon cantilever bimorph device is to be utilized as a thermal infrared detector. Third generation prototypes were designed, fabricated, and are being tested. These device utilize a capacitive readout scheme, a double-beam design in order to eliminate the effect of residual stress in the polymer layer, and a nitride stopper layer for reduced sticking and pull-in. Devices are characterized using optical and thermal methods. Future goals include detailed characterization of the current prototypes, analytical model correlation, low-pressure testing, geometric optimization, and the fabrication of arrays.

Project end date: 08/12/10

Clinton G. Warren
Publication date: 
February 1, 2010
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2010

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