BPN411: Tribology Test Chip for Contacting NEMS design


Tribological effects such as surface stiction and charging are not well understood. This research aims to develop test structures to study these phenomenon and give designers an understanding of the challenges we will face as NEMS devices scale. All-electronic metrology is proposed for this tribology chip, which is a departure from the traditional method of optical inspection for MEMS devices.

Project end date: 01/08/08

Publication date: 
August 14, 2007
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2007

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