BPN405: Manufacturing Repeatability of the Frequency and Q of Capacitive Micromechanical Disk Resonators


The long-term goal of this project is to devise methods for improving the untrimmed repeatability of micromechanical resonators so as to widen the breadth of applications addressable by such devices.

Project end date: 08/11/09

Publication date: 
February 24, 2009
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2009

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