The long-term objective of this project is to realize self-temperature compensating narrow band filter bank for wireless communication systems. In this work, post-CMOS compatible aluminum nitride (AlN) RF Lamb wave resonators (LWR) are used as building blocks. LWR have the advantages of permitting multi-frequency devices with high Q (~3000) and low motional resistance (~100ohm). Different approaches including overhang adjustment are used to finely select the resonance frequency of LWR. Successful testing in high temperature up to 600C opens the potential applications of AlN resonator technology in harsh environments.
Project end date: 08/14/12