The Q-factor of a MEMS resonator is the result of a number of mechanisms: many of the damping sources are related with the evironment where the device is working such as air damping or viscous damping but many others are an intrinsic property of the vibrating structure. Among those the most common source of energy loss are the anchor losses, the excitation of spurious mode and the Thermo Elastic Damping (TED). The long-term objective of this project is to characterize the energy dissipation due to thermoelasticity in piezoelectric materials. In particular due to the increasing interest showed for its applications in RF-MEMS resonators, this work will be focused on Aluminum Nitride.
Project end date: 08/19/09