BEB16: Resonant Drive: Sense and High Voltage Electrostatic Drive Using Single MEMS Electrode


A new technique for electrostatic drive and sense is developed. The main goal is to simplify the complexity of drive and sense circuitry. The new approach will alleviate the need for high voltage circuitry even in voltage demanding MEMS applications. Since only a single drive capacitor is needed for both drive and sense, resonant drive will also simplify the design of the physical device.

Project end date: 02/03/05

Publication date: 
September 8, 2004
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2004

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