APP89: Monolithic Piezoelectrically-Actuated MEMS Tunable VCSEL


A novel piezoelectrically-actuated microelectromechanical system (MEMS) tunable vertical-cavity surface emitting laser (VCSEL) is to be designed, fabricated and evaluated to provide improved wavelength control with lower power supply voltages and reduced external losses. Applications include signal routing and switching in modern optical communication networks and VCSEL-pumped atomic clocks. The project will focus on device design, modeling and monolithic integration of piezoelectric controlled MEMS with VCSEL for wavelength control.

Project end date: 07/30/06

Benjamin Cheng
Mike Huang
Publication date: 
January 12, 2006
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2006

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