APP66: Piezoelectric MEMS for Resonator Applications


The goal of this project is to develop piezoelectric aluminum nitride (AlN) MEMS resonators for frequency reference and bandpass filtering applications to enable novel, highly-integrated radio front ends. The demand for highly-integrated analog filtering and frequency reference elements has spurred rapid innovation in the area of vibrating RF MEMS. To date however, no single technology has emerged that can simultaneously deliver monolithic, post-CMOS integration of intermediate frequency (IF) and radio frequency (RF) components that can readily interface with 50 Ohm RF systems.

Project end date: 01/24/07

Andrew S. Cardes
Philip J. Stephanou
Publication date: 
August 23, 2006
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2006

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