APP53: MEMS Strain Gauge on Steel: Resonant Sensor Design and Fabrication

To fabricate a strain sensor capable of measuring micro-strain (10e-6) with a gauge length no greater then 1 mm. The sensor will be capable of in-situ mounting on pre-existing, minimally treated steel substrates. In addition, the sensor will also have a dynamic range of at least 0-1000 Hz, and maintain sensitivity and linearity over a range of temperatures and environmental conditions. In particular, this project is examining the use of a resonant element (tuning fork) to transduce strain into a electrical signal via capacitive sensing (both comb finger and parallel plate.)

Project end date: 02/09/04