BPNX1052: Piezoelectric MEMS Programmable Photonic Integrated Circuits (New Project)

Abstract: 

Integrated silicon photonic switches are extensively used in modern compute infrastructure, serving as fundamental building blocks for high-speed data communication and computing in large-scale data centers. Our group has previously developed MEMS-based photonic switches that achieve large-scale integration, high bandwidth, and low optical loss. However, their operation is limited by the high driving voltages inherent to electrostatic MEMS actuation.

In this project, we aim to develop piezoelectric MEMS-based programmable integrated circuits for optical signal routing and on-chip matrix multiplication, leveraging lithium niobate provided by our industry collaborator. By employing piezoelectric actuation, our goal is to achieve CMOS-compatible driving voltages while enabling analog optical signal processing for advanced computing applications.

Project is currently funded by: Member Fees

Publication date: 
August 13, 2025
Publication type: 
BSAC Project Materials (Current)
Citation: 
PREPUBLICATION DATA - ©University of California 2025

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