RTH30: Micromachined Electrodes for Capacitive Sensors

Abstract: 

The goal of this project is to develop and batch fabricate a very precise electrode for a high performance capacitive sensor using microfabrication techniques.

Project end date: 02/06/04

Author: 
Noel Arellano
Publication date: 
August 13, 2003
Publication type: 
BSAC Project Materials (Final/Archive)
Citation: 
PREPUBLICATION DATA - ©University of California 2003

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Tags

Package, Process & Microassembly topic page, Roger T. Howe (Advisor) topic page