Roger T. Howe (Advisor)

Integrated MEMS Tuning Fork Oscillators for Sensor Applications

Trey Roessig
Albert P. Pisano
Kameshwar Poolla
Roger T. Howe
1998
In this work, issues involved in the design resonant sensors in a surface- micromachined fabrication technology are investigated. The goal of this work is to describe the important considerations in each portion of the sensor design, including the ...

Micromachined Dual Input Axis Rate Gyroscope

Thor Juneau
Albert P. Pisano
Roger T. Howe
Roberto Horowitz
1997
The need for inexpensive yet reliable angular rate senors in fields ranging from automotive to consumer electronics has motivated prolific micromachined rate gyroscope research. The vast majority of research has focused on single input axis rate gyroscopes based upon either translational resonance, such as tuning forks, or...

Polycrystalline Silicon-Germanium Films for Integrated Microsystems

Andrea Franke
Tsu-Jae King
Roger T. Howe
Timothy Sands
2000

Poly cystalline silicon (poly-Si) and silicon dioxide (SiO2) are the standard strucutral and sacrifical materials in surface micromachines MEMS. Polycrystalline silicon-germanium (poly-SiGe) can be deposited in a standard LPCVD furnace at much lower temperatures (less than or equal to 450degC) than poly-Si. This allows integration of poly-SiGe MEMS after completion of a CMOS process with Al or Cu interconnects. Modularly integrating MEMS onto wafers with standard CMOS circuits reduces parasitics, increases packaging simplicity and reliability, could lower processing cost, allows for...

Surface Engineering for MEMS Reliability

William Ashurst
Roya Maboudian
David B. Graves
Roger T. Howe
2003

The integration of miniaturized mechanical components with microelectronic components has spawned a new technology known as microelectromechanical systems (MEMS). This technology extends the benefits of microelectronic fabrication to sensing and actuating functions. Examples of MEMS devices that have been commercially produced include relatively simple mechanisms such as accelerometers, pressure sensors and digital mirror projectors.

Despite recent progress in micromachining capability, the realization of more complex commercial and specialized use of MEMS is challenged due to...

Maryam Ziaei-Moayyed

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
M.S. 2005

Moorthi Palaniapan

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2002

Karen Scott

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2003

Andrea Franke

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2000

Sharon Oh

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
M.S. 2001

Emmanuel Quevy

Alumni
Professor Roger T. Howe (Advisor)
PostDoc 2005