Richard S. Muller (Advisor)

KSJP30/JD: Electrometrology with MEMS

David Garmire
Hyuck Choo

Practical analysis techniques to accurately measure geometric, dynamic, and material properties of MEMS will be developed. Analytical methods and test structures will be made to extract over two dozen properties by electric probing in a minimal chip area. Geometric properties will include fabrication error with respect to layout geometry such as beam widths, gap spacings, etch holes, and beam lengths. Dynamic properties will include mass, damping, stiffness, bulk compliance, quality factor, exponential damping factor, displacement amplitude, velocity amplitude, comb drive force, and...

BPN337: Fast, MEMS-Based Phase-Shifting Interferometer

Hyuck Choo
Rishi Kant
David Garmire

We are developing a handheld bio-chemical sensor using the fast, MEMS-based, phase-shifting interferometer (MBPSI) that we have demonstrated at the Berkeley Sensor & Actuator Center.

Project end date: 08/12/08

Scanning Blazed Gratings

Kristine Marie Rosfjord
Kam Y. Lau
Richard S. Muller
Diffraction gratings are highly important and widely used in many optical instruments and systems. In the field of spectroscopy, gratings are the enabling devices for the monochromators and spectrometers used in fields ranging from chemistry and biology to optoelectronics and telecommunications. Within the field of...

Piezoresistive Sensing in Micromechanical Resonators

Yorgen H. Anderson
Richard S. Muller
Richard M. White
Over the past several years, there has been much research concerned with building miniature three-dimensional mechanical machines (micromachines) on silicon substrates using fabrication technology from the integrated circuit industry. These micromachines can be useful...

Polysilicon Micromolding of Closed-Flow Passages for the Fabrication of Multifunctional Microneedles

Neil Hamilton Talbot
Albert P. Pisano
Dorian Liepmann
Richard S. Muller

Three aspects of MEMS microneedle technology are developed in this work. First, a new two-wafer polysilicon micromolding process for the fabrication of multifunctional microneedles is developed. Second, microneedle strength is addressed including the investigation of strengthening methods. Lastly, the fluid-flow properties of microneedles are studied analytically and experimentally.

Polysilicon microneedles of smaller size and greater sharpness than stainless steel needles have been fabricated using a two-way polycrystalline silicon (polysilicon) micro molding process called...

Modulated Infrared Source

Peter Yung-Sen Chen
Richard S. Muller
Roger T. Howe
This project considers the design and fabrication of a modulated microincandescent IR source. To reduce background noise and to improve signal amplification, most infrared applications require a modulated IR output at a fairly high frequency (above 1kHz)....

MEMS Barcode Reader

James Teng
Richard S. Muller
Kam Y. Lau

Since the concept of barcode scanning was proposed over forty years ago [I], the use of barcodes and barcode readers have progressed to the point that it is the most common method for automatic item identification. The proliferation of...

Magnetic Microactuators with Polysilicon Flexures

Jack William Judy
Richard S. Muller
Seth Sanders

A novel microactuator technology that combines magnetic thin films with polysilicon flexural structures is described. Micromechanical structures, actuated by an off-chip magnetic field, are constructed in a batch-fabrication process that combines electroplatingwith conventional lithography, materials, and equipment. A microactuator consisting of a 400x(47-40)x7μm^3 rectangular plate of NiFe attached to a 400x(0.9-1.4)x2.25μm^3...

Highly Scalable Silicon Photonic Switches Based on Waveguide Crossbar with Movable Waveguide Couplers

Sangyoon Han
Ming C. Wu
Richard S. Muller
Liwei Lin
Fast optical-circuit-switches (OCS) having a large number of ports can significantly enhance the performance and the efficiency of modern data centers by actively rearranging network patternsCommercially available optical switches typically operate with the use of moving mirror arrays. These switches can have port...

Development of a Free-Space Optical Switch for Fiber Communications Based on Actuated, Silicon Surface-Micromachined Mirrors

Alois Friedberger
Richard S. Muller
Optical communication networks require switches for fiber links. Free-space optical switches have the potential of high coupling efficiencies and are investigated for fabrication by silicon surface-micromachining. Due to batch processing, this technology can provide large...