Richard S. Muller (Advisor)

This dissertation discusses the design and fabrication of micro-optical scanners that have high-quality optical-surface properties and are capable of previously unattainable high scanning rates. Scanners having high-quality optical surfaces are fabricated and characterized in both diffractive and reflective applications.

A first project investigates methods of creating scanning rectangular diffraction gratings using well-established fabrication methods of silicon surface-micromachining in a foundry process. We then introduce new methods to form an actuated blazed grating, a...

A magnetically actuated microplatform for use in invivo instrumentation applications is described. A specific embodiment for an intravascular ultrasound imaging system is the focus of this research. Magnetic microactuators with the ability to carry ultrasound transducer elements while in a liquid have been demonstrated. These actuators have also shown the ability to rotate the required angular range (+/-45) within the specified magnetic field limits (less than 150...