Richard S. Muller (Advisor)

BPN337: Fast, MEMS-Based Phase-Shifting Interferometer

Hyuck Choo
Rishi Kant
David Garmire
2008

We are developing a handheld bio-chemical sensor using the fast, MEMS-based, phase-shifting interferometer (MBPSI) that we have demonstrated at the Berkeley Sensor & Actuator Center.

Project end date: 08/12/08

Scanning Blazed Gratings

Kristine Marie Rosfjord
Kam Y. Lau
Richard S. Muller
2001
Diffraction gratings are highly important and widely used in many optical instruments and systems. In the field of spectroscopy, gratings are the enabling devices for the monochromators and spectrometers used in fields ranging from chemistry and biology to optoelectronics and telecommunications. Within the field of...

Piezoresistive Sensing in Micromechanical Resonators

Yorgen H. Anderson
Richard S. Muller
Richard M. White
1993
Over the past several years, there has been much research concerned with building miniature three-dimensional mechanical machines (micromachines) on silicon substrates using fabrication technology from the integrated circuit industry. These micromachines can be useful...

Polysilicon Micromolding of Closed-Flow Passages for the Fabrication of Multifunctional Microneedles

Neil Hamilton Talbot
Albert P. Pisano
Dorian Liepmann
Richard S. Muller
1999

Three aspects of MEMS microneedle technology are developed in this work. First, a new two-wafer polysilicon micromolding process for the fabrication of multifunctional microneedles is developed. Second, microneedle strength is addressed including the investigation of strengthening methods. Lastly, the fluid-flow properties of microneedles are studied analytically and experimentally.

Polysilicon microneedles of smaller size and greater sharpness than stainless steel needles have been fabricated using a two-way polycrystalline silicon (polysilicon) micro molding process called...

Magnetic Microactuators with Polysilicon Flexures

Jack William Judy
Richard S. Muller
Seth Sanders
1994

A novel microactuator technology that combines magnetic thin films with polysilicon flexural structures is described. Micromechanical structures, actuated by an off-chip magnetic field, are constructed in a batch-fabrication process that combines electroplatingwith conventional lithography, materials, and equipment. A microactuator consisting of a 400x(47-40)x7μm^3 rectangular plate of NiFe attached to a 400x(0.9-1.4)x2.25μm^3...

Modulated Infrared Source

Peter Yung-Sen Chen
Richard S. Muller
Roger T. Howe
1993
This project considers the design and fabrication of a modulated microincandescent IR source. To reduce background noise and to improve signal amplification, most infrared applications require a modulated IR output at a fairly high frequency (above 1kHz)....

MEMS Barcode Reader

James Teng
Richard S. Muller
Kam Y. Lau
1998

Since the concept of barcode scanning was proposed over forty years ago [I], the use of barcodes and barcode readers have progressed to the point that it is the most common method for automatic item identification. The proliferation of...

Highly Scalable Silicon Photonic Switches Based on Waveguide Crossbar with Movable Waveguide Couplers

Sangyoon Han
Ming C. Wu
Richard S. Muller
Liwei Lin
2016
Fast opticalcircuitswitches (OCS) having a large number of ports can significantly enhance the performance and the efficiency of modern data centers by actively rearranging network patternsCommercially available optical switches typically operate with the use of moving mirror arrays. These switches can have port counts...

Development of a Free-Space Optical Switch for Fiber Communications Based on Actuated, Silicon Surface-Micromachined Mirrors

Alois Friedberger
Richard S. Muller
1996
Optical communication networks require switches for fiber links. Free-space optical switches have the potential of high coupling efficiencies and are investigated for fabrication by silicon surface-micromachining. Due to batch processing, this technology can provide large...

Miniature Gaseous Light Sources

Hsi-Jen Yeh
Richard S. Muller
Roger T. Howe
1991

This report describes miniature gas-filled plasma-discharge cavities fabricated using combined surface and subsurface micromachining. Starting with a bare silicon substrate, successive layers of polycrystalline silicon, low-stress silicon nitride, and low-temperature oxide layers were deposited to form the micro cavities. Polysilicon electrodes were patterned to serve as electrical connections to the gas. Low-stress silicon nitride formed the insulating layer and the cavity wall which confined neon at atmospheric pressure. Low-temperature oxide served as the sacrificial layer which defined...