Publications

Magnetic Field Sensing Using Micromechanical Oscillators

Soner Sonmezoglu
David A. Horsley
Rajeevan Amirtharajah
Xiaoguang “Leo” Liu
2017
Lorentz force magnetic sensors based on micro-electromechanical system (MEMS) resonators, measuring the vector components of the magnetic field, have recently attracted substantial commercial interest in inertial navigation systems (INSs) and compasses for smartphones. Over the last decade, substantial research effort has focused on improving the magnetic field sensitivity and resolution of Lorentz force magnetic sensors relying on either amplitude modulation...

Materials Science and Device Physics of 2-Dimensional Semiconductors

Hui Fang
Ali Javey
Ramamoorthy Ramesh
Junqiao Wu
Eli Yablonovitch
2014

Materials and device innovations are the keys to future technology revolution. For MOSFET scaling in particular, semiconductors with ultra-thin thickness on insulator platform is currently of great interest, due to the potential of integrating excellent channel materials with the industrially mature Si processing. Meanwhile, ultra-thin thickness also induces strong quantum confinement which in turn affect most of the material properties of these 2-dimensional (2-D) semiconductors, providing...

Massively Parallel Optical Manipulation of Single Cells, Micro- and Nano-particles on Optoelectronic Devices

Pei-Yu Chiou
Ming C. Wu
Connie J. Chang-Hasnain
Luke P. Lee
2005
The ability to manipulate biological cells and micrometer-scale particles plays an important role in many biological and colloidal science applications. However, conventional manipulation techniques, such as optical tweezers, electrokinetic forces (electrophoresis, dielectrophoresis (DEP), and traveling-wave dielectrophoresis), magnetic tweezers, acoustic traps, and hydrodynamic flows, cannot achieve high resolution and high...

MEMS Hydrogel Sensors for pH and Glucose Measurements

Supone Manakasettharn
Albert P. Pisano
Liwei Lin
2008
A new formulation of a pHand a glucoseresponsive hydrogel was developed and then integrated into an interdigitated MEMS sensor. This new hydrogel was characterized for swelling response as well as for impedance response (resistance and capacitance) when used as both a pH and a glucose sensor. The standard pHresponsive hydrogel, which was a copolymer of 2hydroxyethyl methacrylate and...

Micro Chemical Vapor Deposition for the Synthesis of Nanomaterials

Qin Zhou
Liwei Lin
Albert P. Pisano
Ali Javey
2011

MEMS (Microelectromechanical Systems) technologies have enabled the construction of a micro chemical vapor deposition (μCVD) system for the synthesis of nanomaterials. By means of localized resistive heating via microheaters, unique capabilities of the μCVD systems have been utilized to synthesize carbon nanotubes and graphene in this work, including fast stabilization of temperature; rapid exchange of gas species; laminar gas flow due to small Reynolds number; small diffusion...

Metal Optics Based nanoLEDS: In Search of a Fast, Efficient, Nanoscale Light Emitter

Michael Eggleston
Ming C. Wu
Eli Yablonovitch
Xiang Zhang
2015
Since the invention of the laser, stimulated emission has been the de facto king of optical communication. Lasers can be directly modulated at rates as high as 50GHz, muchfaster than a typical solid statelightemitting diode(LED)that is limited by spontaneous emission to <1GHz. Unfortunately, lasers have a severe scaling problem; they require large cavities operated at high power to achieve efficient lasing. A properly...

Monolayer Transition Metal Dichalcogenide NanoLEDs: Towards High Speed and High Efficiency

Kevin Han
Ming C. Wu
Ali Javey
Feng Wang
2019
Onchip optical interconnects promise to drastically reduce energy consumption compared to electrical interconnects, which dominate power dissipation in modern integrated circuits (ICs)One key requirement is a lowpower, highefficiency, and highspeed nanoscale light source. However, existing IIIV semiconductor light sources face a high surface recombination velocity (SRV ~ 104–106cm/s...

MEMS Aluminum Nitride Technology for Inertial Sensors

Gabriele Vigevani
Albert P. Pisano
Liwei Lin
Ming C. Wu
2011
The design and fabrication of MEMS Inertial Sensors (both accelerometers and gyro-scopes) made of Aluminum Nitride (AlN) is described in this dissertation. The goal of this work is to design and fabricate inertial sensors based on c-axis oriented AlN polycrystalline thin films. AlN is a post-CMOS compatible piezoelectric material widely used for acoustic resonators, such Bulk Acoustic Wave (BAW) and Lamb Wave Resonators(LWR). In this work we develop the design techniques necessary to obtain inertial sensors...

Material Synthesis and Characterization for Micro-supercapacitor Applications

Benjamin Hsia
Roya Maboudian
David B. Graves
Liwei Lin
2013

Supercapacitors represent a critical energy storage device technology for applications which require higher power density and/or cycle lifetime than existing battery technologies. Microscale supercapacitors, in particular, can enable novel applications in autonomous, wireless microsensors and microelectronics. If these micro-supercapacitors can be fabricated in a planar, on-chip geometry, the energy storage and the device...

MEMS Design via Automated Synthesis, Extraction, and Simulation

Hee Jung Lee
Kristofer S.J. Pister
1996

System level computer aided design (CAD) tools for micro electromechanical systems (MEMS) have been developed based on VLSI CAD techniques. This CAD package includes parameterized synthesis, extraction, and simulation tools. These tools are being integrated into the ASIC design tools ...