Liwei Lin (Advisor)

Research Advised by Professor Liwei Lin

Lin Group:  List of Projects | List of Researchers

Takeshi Hayasaka

Alumni
Mechanical Engineering
Professor Liwei Lin (Advisor)
Ph.D. 2019

Yue Liang

Alumni
Mechanical Engineering
Professor Liwei Lin (Advisor)
Ph.D. 2020

Ilbey Karakurt

Alumni
Mechanical Engineering
Professor Liwei Lin (Advisor)
Ph.D. 2020

Chip-scale Lidar

Behnam Behroozpour
Bernhard E. Boser
Ming C. Wu
Liwei Lin
2016

The superiority of lidar compared to radio-frequency and ultrasonic solutions in terms of depth and lateral resolution has been known for decades. In recent years, both application pull such as 3D vision for robotics, rapid prototyping, self-driving cars, and medical diagnostics, as well as technology developments such as integrated optics and tunable lasers have resulted in new activities. Pulsed, amplitude-modulated continuous-wave (AMCW), and frequency-modulated continuous-wave (FMCW) lidars can all be used for ranging. The latter option enables excellent depth resolution at the...

Frequency Tunable MEMS-Based Timing Oscillators and Narrowband Filters

Henry Barrow
Clark T.-C. Nguyen
Kristofer S.J. Pister
Liwei Lin
2015

Both the accuracy of the clocks and ability of filters to achieve bandwidths small enough to select individual channels depend heavily on the accuracy and precision to which the frequency-setting devices they rely on are constructed. Inevitably, fabrication tolerances are finite, which means the ability to attain the highest performance relies on trimming or tuning. This dissertation focuses on methods by which voltage-controlled frequency tuning of capacitively-transduced micromechanical resonators make possible 1) an ultra-compact, low-power 32.768-kHz micromechanical clock...

Curved and Bimorph Piezoelectric Micromachined Ultrasonic Transducers (PMUT)

Sina Akhbari
Liwei Lin
George C. Johnson
Tsu-Jae King Liu
2016

Ultrasonic transducers have been realized as nondestructive tools for a variety of applications, such as medical imaging, diagnosis, therapy, nondestructive testing, range finding, and gesture recognitions. Ultrasonic transducers fabricated by MEMS (Microelectromechanical Systems) technologies are known to have distinct advantages over conventional ultrasound devices in terms of device resolution, bandwidth, power consumption, and cost. This work focuses on innovative architectures of Piezoelectric Micromachined Ultrasonic Transducers (pMUT) for improved electro-mechano-acoustical...

APP54: MEMS Strain Gauge on Steel: Testing Localized Silicon-Steel Bonds

Theodore Prescop
2003

A rapid bonding process for installing vacuum sealed MEMS strain sensor modules to mechanical components is being developed. This innovative process will be developed to replace conventional adhesive-based approaches. In particular, the silicon to steel bond must achieve these stringent requirements: long life, resistance to chemicals, short bonding process time, and a wide range of storage temperatures. To ensure that the strain within a steel substrate will be accurately measured by the MEMS strain gauge, properties of the bond layer between silicon and steel are observed and...

LWL4: MEMS Sensor for Hard Disk Glide Test

Jongbaeg Kim
2003

Characterization of pitch and roll motions of the slider in the hard disk gimbal system are important parameters in order to achieve higher aerial recording densities. This project describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider.

Project end date: 07/31/03

LWL19: Nickel Nanocomposite Film for MEMS Applications

Kwok-Siong Teh
2003

The ultimate goal is to develop CMOS-compatible, low cost nickel-nanocomposite materials to complement polysilicon for use as MEMS structural material.

Project end date: 01/24/04

LWL22: Nanostructure-Based Nanoactuator

Maggie Chau
2003

This project aims to develop nanoactautors based on the actuation of nanostructures such as nanowires and/or nanotubes. With the emerging technology of producing silicon nanowires and carbon nanotubes (CNTs), designing an actuation application would be the next advancement of nanotechnology. This nano actuator will be fabricated by the in-house produced silicon nanowires/carbon nanotubes. Additional processing steps and actuation means will be required to manifest the nanostructures for actuation demonstrations. We intend to investigate related design, process and material issues to...