Resonant MEMS sensors are commonly used for sensing pressure, mass, force, strain, and acceleration. Resonant readout is particularly attractive for piezoelectric sensors, since it is the only method that allows measurement of static or slowly-varying quantities. Fundamentally, resonant readout relies on a fixed dependence between the quantity to be measured and the resonant frequency of a mechanical structure. However, the resonant frequency is generally also a strong function of several unwanted variables, including temperature, fabrication variability, and packaging stress. One...