Albert P. Pisano (Advisor)

The goal of the MEMS REPS Integrated Generator project is to design and fabricate a millimeter-scale electric machine to generate power from the mechanical torque of a liquid hydrocarbon fueled MEMS rotary engine.

Project end date: 02/03/05

Biologists at Lawrence Livermore National Laboratory are performing rigorous cell research, in which standard cell analysis techniques has provided limited information. The current analysis techniques are typically external observation based, however, it has become apparent that internal observation techniques may be required for a better and more thorough understanding of cellular function. The devices under investigation in this collaborative project between LLNL and UC Berkeley aim to help fulfill this need. The devices, which are based on both MEMS and NEMS technologies, will be...

The project goal is the design, fabrication, and testing of the structural component in the cell-based environmental monitoring sensor. The structure will consist of a microfabricated array of cell wells as well as multi-level microfluidic manifolds to carry the necessary fluids to these wells. While the cells are being stored, liquid nitrogen would flow through channels around the wells and bring the cells to cryogenic temperatures. At room temperature, the functioning cells would be supplied with food and have their waste removed through two separate fluid lines under the wells....

The demand of consumer electronics for RF filters and frequency reference elements has focused attention on the reduction of size, power consumption and price and pushed current research interests towards the manufacturing of a single-chip, integrated RF solution. Vibrating contour-mode MEMS resonators constitute the most promising technology for ultimately realizing this vision. This project deals with analytical and experimental results on a new class of contour-mode aluminum nitride piezoelectric resonators. The realization of contour mode shapes in piezoelectric resonators,...