NanoTechnology: Materials, Processes & Devices

Research that includes:

  • Development of nanostructure fabrication technology
  • Nanomagnetics, Microphotonics
  • CMOS Integrated Nanowires/Nanotubes (CMOS-Inn)

BPNX1054: Tungsten Oxide Adhesion Layer for Low Resistance Hole Contacts to WSe2

Dorottya Urmossy
Inha Kim
Kyuho Lee
2026

Transition metal dichalcogenides (TMDs) are promising candidates for rapidly scaled, high-performing devices due to their atomically thin nature. However, the dangling bond-free surfaces of TMDs fundamentally challenge the creation of strongly bonded metal contacts. Here, we introduce tungsten oxide (WOx) as an interfacial adhesion layer for low-resistance hole contacts on monolayer WSe2. We show that the WOx adhesion layer exhibits a two-fold increase in adhesion force on both WSe2 and SiO2 surfaces and a twofold reduction in total resistance compared to devices with conventional titanium...

BPNX1053: Micrometer-Scale Merged-Element Superconducting Qubits with Phonon Engineering

Leo Sementilli
Kerry Yu
2026

Classical computing relies on large arrays of robust miniaturized bits. Similarly, the development of useful quantum computing requires millions of low-footprint error-tolerant qubits. Current state-of-the-art superconducting qubits are not compatible with this approach as they rely on large device areas to increase qubit lifetimes and reduce noise. This limits the practicality of building a scalable superconducting quantum computer given size constraint. We explore an alternative to this limitation, where we predict both orders-of-magnitude reduction in qubit footprint and...

BPN953: Long-Term Drift of MEMS-Based Oscillators

Neil Chen
Kevin H. Zheng
Xintian Liu
Qiutong Jin
2026

This project seeks to characterize and de-mystify mechanisms behind long-term drift in MEMS-based oscillators, including ones employing various sustaining amplifiers and referenced to resonators constructed in a variety of materials, including silicon, polysilicon, AlN, diamond, and ruthenium. A measurement apparatus that suppresses unwanted sources of drift, e.g., temperature, to better focus on resonator and oscillator long-term drift will be instrumental to success and will likely entail the use of double or triple ovens, as well as environment resistant circuit design.

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BPNX1066: Tunable Ultrahigh-Impedance Superconducting Resonators for Quantum Transduction (New Project)

Tae Gyu Ahn
Zihuai Zhang
2026

Disordered superconductors provide access to a unique regime of superconducting quantum circuits due to their large kinetic inductance, strong intrinsic nonlinearity, and high characteristic impedance. These properties enable compact microwave structures with strong electric field confinement, opening new opportunities for engineered light–matter interactions in reduced footprints. We are developing a DC-tunable, high-impedance superconducting nanowire platform based on TiN, a strongly disordered superconductor. The large kinetic inductance of TiN nanowires enables characteristic...

Ultra-Sensitive Nanosensor for Rapid Detection of PFAS in Simulated Drinking Water

Nikita Lukhanin
Keming Bai
Mia Wang
Declan M. Fitzgerald
Grigory Tikhomirov
Liwei Lin
2026

Per- and polyfluoroalkyl substances (PFAS) are a class of persistent synthetic compounds, often called “forever chemicals,” that pose a significant threat to public health and the environment. Standard detection methods primarily rely on liquid chromatography and mass spectrometry [1], which is expensive, time-intensive, and requires trained personnel and laboratory infrastructure. While emerging approaches using metal-organic frameworks (MOFs), molecularly imprinted polymers, and lateral flow assays have been explored, they have yet to provide a solution that simultaneously offers part-...

CMOS-Embedded Microfluidics for Channel-Addressable Parallel Readout of SPAD Fluorescence Lifetime Sensors

Max Ladabaum
Alexander Di
Julian M. Bao
Grigory Tikhomirov
Jun-Chau Chien
2026

We present the integration of CMOS-embedded subtractive microfluidics with single-photon avalanche diode (SPAD) fluorescence lifetime sensors, enabling independent channel addressability for parallel readout. Microfluidic channels are realized by selectively wet-etching the back-end-of-line (BEOL) metal routing above the SPAD sensors, reducing the analyte-to-active-region spacing to 7 μm while allowing for precision alignment. Simultaneous readout from two SPADs underneath two separate fluidic channels is demonstrated, establishing a pathway toward a scalable, multiplexed lab-on-CMOS...

BPNX1044: Exploring Tellurium Compound‐Based p‐Type Channels for Various Functionalities

Taehoon Kim
I K M Reaz Rahman
Naoki Higashitarumizu
Inha Kim
Hyong Min Kim
Shu Wang
Robert Tseng
2026

​Tellurium-based materials (tellurides) are promising materials for p-channel transistors due to their compatibility with various elements and deposition methods. This versatility facilitates integration into diverse device architectures and enables the implementation of tailored electrical, thermal, optical, and structural properties. We investigate tellurium-based materials and their deposition techniques to optimize these multifaceted characteristics for advanced electronic applications.

Project is currently funded by: Federal

BPNX1067: High-Efficiency Impedance Transformers for Microwave-to-Optical Quantum Transducers (New Project)

Ahmet Oguz Sakin
Nicholas Yama
Tae Gyu Ahn
2026

We are developing high-efficiency microwave impedance transformers for microwave-to-optical quantum transducers. Our goal is to match a standard 50 Ω microwave environment to a novel high-impedance electro-optic (EO) device based on a 20-kΩ impedance traveling-wave modulator. The high impedance strengthens the microwave-to-optical interaction, enhances light–matter interaction inside the EO medium, and improves the overall transduction efficiency. We will use a Klopfenstein taper design as it provides low reflection with a compact length over a broad bandwidth. We target 4–8 GHz operation...

BPNX1065: Compact, Low-Loss Capacitors for High-Coherence Merged-Element Superconducting Qubit Architectures (New Project)

Xiaoya Chen
Kerry Yu
Leo Sementilli
2026

Superconducting qubits are a leading platform for scalable quantum computing. The transmon qubit, consisting of a Josephson junction (JJ) shunted by a coplanar capacitor, is widely adopted due to its robustness against charge noise. However, its scalability is limited by the large footprint and dielectric losses at material interfaces. The merged-element transmon (MET) was introduced to enable a more compact architecture, yet in current implementations, although the JJ area can be reduced to ~3 µm², the coplanar capacitor still occupies ~100 µm². Moreover, its planar geometry generates...

BPNX1064: Annealed Al/AlOx/Al Josephson Junctions for High-Coherence Merged-Element Superconducting Qubits (New Project)

Darius F. Vera
Leo Sementilli
Kerry Yu
2026

Superconducting transmon qubits are one of the most promising platforms to realize fault-tolerant quantum computing and allow a rich parameter space of highly configurable qubit properties with various circuit elements. Ultra thin amorphous oxide tunnel barriers (such as Al/AlOx/Al) known as Josephson junctions (JJ) provide essential nonlinearity to the qubit energy landscape. Precise control over the morphology of these thin amorphous oxide tunnel barriers remains a significant challenge despite its critical role in determining structural and transport properties. Furthermore, materials...