BPN497: MEMS Power: Design and Characterization of a MEMS Piezoelectric Bi-Chevron Actuator


The long range goal of this research is to design and characterize a microscale piezoelectric bi-chevron actuator for application to advanced printing technology (supercritical carbon-dioxide valve, SCV). The bi-chevron actuator is made out of aluminum nitride (AlN), a piezoelectric material. The actuators will be designed to meet the force and displacement requirements of the SCV. Milestones for this project include computer modeling, static and dynamic testing, and characterization of displacement performance with respect to the residual stresses in the AlN film.

Project end date: 08/11/09

Michael S. Sheppy
Publication date: 
February 2, 2009
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2009

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