BPN444: HEaTS: A MEMS Piezoelectric Supercritical Carbon-Dioxide Valve


The long range goal of this research is to design and fabricate a microscale valve suitable for controlling the flow of supercritical carbon-dioxide for application to advanced printing technology (supercritical carbon-dioxide valve, SCV). This valve is actuated by aluminum nitride (AlN) beam with piezoelectric effect. This valve will be integrated with nozzles and microchannels and the whole system will be built using silicon-based micro-electro-mechanical systems (MEMS).

Project end date: 08/18/11

Publication date: 
August 15, 2011
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2011

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