APP97: MEMS Power: Solid State Electrochemical Sensors for Gas Analysis

The goal of this research is the development of wideband solid state electrochemical sensors to measure nitrogen oxides (NOx) on the single ppm level in engine exhaust in order to meet stringent new emissions regulations. This technology consists of a planar, single cell sensor design that can be adapted to detect specific gases by changing the electrode materials and the operating temperature. An impedance method is used to interrogate the sensors and to obtain a signal that is proportional to analyte gas concentration at a specific frequency. A combination of microfabrication techniques and conventional ceramic processing methods are under investigation.

Project end date: 02/03/10