APP48: MEMS Rotary Engine Power System / Soft Magnetic Pole Integration


The goal of this research is to electroform ultra thick ferromagnetic structures into a silicon mold patterned with DRIE.

Project end date: 01/20/05

Debbie G. Jones
Publication date: 
September 10, 2004
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2004

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