Roger T. Howe (Advisor)

Andrei Shkel

Alumni
Professor Roger T. Howe (Advisor)
PostDoc 1999

Weijie Yun

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 1992

Impact Actuation of Polysilicon Micromechanical Structures

Abraham Lee
Albert P. Pisano
Roger T. Howe
1992
Impact on silicon? One may have the experience in dropping a silicon wafer on the floor, and shattering it to pieces. Or trying to dice a wafer by a diamond marker, and accidentally crunching the edges. These experiences may lead...

David Monk

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 1993

Controlled Structure Release for Silicon Surface Micromachining

David Monk
David S. Soane
Roger T. Howe
David B. Graves
1993
Silicon surface micromachining is a new technology that uses many of the common microfabrication techniques found in silicon integrated circuit (IC) production. The key processing step that is the sacrificial layer etch for releasing microstructures which is not ...

Peter Krulevitch

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 1994

Gary Fedder

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 1994

Micromechanical Investigations of Silicon and Ni-Ti-Cu Thin Films

Peter Krulevitch
George C. Johnson
Roger T. Howe
Kyriakos Kornvopoulos
1994
Residual stress, microstructure, and mechanical properties of low pressure chem cal vapor deposited polycrystalline silicon (undoped and phosphorus doped), selectively grown homoepitaxial silicon, and shape memory Ni-Ti-Cu films are investigated. Different methods...

Micromachined Gyroscope with Integrated Electronics

Per Ljung
Albert P. Pisano
Roger T. Howe
Andrew K. Packard
1997

The functionality of traditional electromechanical systems can be fulfilled by micromachined sensors with intern electronics while offering several orders of magnitude size and cost reduction. This work presents a micromachined two input axis angular ...

Thin Film Zinc Oxide Microsensors and Microactuators

Don DeVoe
Albert P. Pisano
Roger T. Howe
Tim Sands
1997
In this work, a variety of piezoelectric sensors and actuators utilizing zinc oxide (ZnO) thin films for electromechanical transduction are presented which rely on surface-micromachining technologies. Specifically, piezoelectric cantilever actuators, open loop accelerometers, and fixed-beam resonant structures are demonstrated using two novel...