Roger T. Howe (Advisor)

Electronics for Resonant Sensors

Kenneth Wojciechowski
Bernhard E. Boser
Liwei Lin
Roger T. Howe
2005
Resonant force or displacement sensing based on observing the change in resonant frequency is attractive because of its relative insensitivity to 1/f noise, high resolution and bandwidth, and “quasi-digital” output. Applications include inertial and strain sensors, biosensors based on mass-loading, and atomic force microscopy. The main contributions of this dissertation are Design of low-noise high fidelity MEMS resonators for sensing, ...

Brian Otis

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2005

Ultra-Low Power Wireless Technologies for Sensor Networks

Brian Otis
Jan Rabaey
Roger T. Howe
2005

The new field of wireless sensor networks presents manmy opportunities and just as many challenges. One particularly difficult aspect of wireless sensing is the implementation of the radio link. To enable energy scavenging, a technique that harvests ambient energy to pwoer the sensor node indefinitely, sub-mW power levels are necessary for the reciever. To allow a small node form-factor, all external surface-mount components must be eliminated. Traditionial RF transceiver design techniques are not suitable for achieving complete integration since they rely on frequency synthesis, requiring...

Brian Bircumshaw

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Professor Roger T. Howe (Advisor)
Ph.D. 2005

Carrie Low

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2006

Modularly Integrated MEMS Technology

Marie-Ange Eyoum
Tsu-Jae King
Roger T. Howe
Sanjay Govindje
2006
Process design, development and integration to fabricate reliable MEMS devices on top of VLSI-CMOS electronics without damaging the underlying circuitry have been investigated throughout this dissertation. Experimental and theoretical results that utilize two “Post-CMOS” integration approaches will be presented. The first integration approach uses SiGe MEMS technology for the “Post-CMOS” monolithic integration of the MEMS devices...

Marie-Ange Eyoum

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2006

Silicon Carbide Thin Films via Low Pressure Chemical Vapor Deposition for Micro- and Nano-electromechanical Systems

Christopher Roper
Roya Maboudian
Roger T. Howe
David B. Graves
Albert P. Pisano
2007
Micro- and Nano-electromechanical Systems (MEMS and NEMS) consist of devices which can sense and actuate on the micrometer and nanometer scales. A number of MEMS devices have been commercialized, including accelerometers, gyroscopes, pressure sensors, and micromirror displays. The most common structural layer used in this technology is polycrystalline silicon, which is adequate for MEMS/NEMS devices operating in ambient environments; however, the use...

Donovan Lee

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2010

RTH/JDK1: A Microfabricated Electrochemical Oxygen Generator for High-Density Cell Culture Arrays

William J. Holtz
Khoa Nguyen
2003

The goal of this project was to design, fabricate and characterize an electrochemical oxygen micro-generator suitable for use in high density miniature cell culture arrays.Arrays of miniature bioreactors were built and oxygen was supplied to them via electrochemical oxygen microgenerators.

Project end date: 08/20/03