Richard S. Muller (Advisor)

The design, fabrication and testing of electrostatically drive, high-sensitivity dc voltmeters (ESVs), which have demonstrated sensitivity to 10 mV signals is presented in this report. The ESVs have a micromachined test electrode (third layer of polysilicon) 5 um above the shutter, which provides testing repeatability, increased sensitviy to the input and most importantly the ability to accurately model ESV performance. The theoretical first- and second-harmonic output currents are derived. The results of predicted and experimentally meausred signals are compared and show the validity of...

Image resolutions of modern optical systems are many times limited by wavefront aberrations due to turbulence in the optical media. Adaptive Optics (AO) is a technology that utilizes deformable mirrors (DM) to correct the wavefront distortion, thereby enhancing the image resolution. In this research, we investigate the design and fabrication of micromechanical-deformable-mirror arrays for AO applications. The mirror arrays are produced using surface micromachining techniques developed for the fabrication of Microelectromechanical Systems (MEMS).

Because many AO...