Publications

Integrated Surface Micromachined Frame Microgyroscopes

Moorthi Palaniapan
Roger T. Howe
Albert P. Pisano
Roberto Horowitz
2002
In this work, two different integrated surface-micromachined z-axis vibratory rate gyroscopes are evaluated. Frame microgyroscopes using 'Inside Sense Outside Drive' suspension design were proposed and compared with 'Inside Drive Outside Sense' design. In the 'Inside Sense Outside Drive' frame design, the outer mass (...

Integrated Nanoscale Antenna-LED for On-Chip Optical Communication

Seth Fortuna
Ming C. Wu
Eli Yablonovitch
Jie Yao
2017
Traditional semiconductor light emitting diodes (LEDs) have low modulation speed because of long spontaneous emission lifetime. Spontaneous emission in semiconductors (andindeed most light emitters) is an inherently slow process owing to the size mismatch betweenthe dipole length of the optical dipole oscillators responsible for light emission and the wave-length of the emitted light. More simply stated: semiconductors behave as a poor antenna for its own light emission. By coupling a semiconductor at the...

Inductor Optimization for Passive Wireless Implantable Capacitive Sensors

Neel Shah
Shuvo Roy
Albert P. Pisano
2011

There are many clinical scenarios in which continuous monitoring of vital physiological signs is desired. Pressure monitoring in particular has diverse uses in the body. Specific application areas include checking arterial blood pressure for detection of changing heart conditions, monitoring intracranial pressure for stroke victims, tracking post-surgery pressure profiles in spinal columns to determine treatment efficacy, and recording subtle changes in intraocular pressure to...

Immunosensor: A CMOS/MEMS-Based Protein Sensor

Bernhard E. Boser
Richard M. White
P. Robert Beatty
Eva Harris
2001

Millions of people each year die of infectious diseases. The need for rapid and efficient diagnostics is extremely prevalent. Current diagnostic tools are found only in the laboratories of well-equipped hospitals, research labs and clinics. Simple, common tests are becoming available...

Integrated MEMS Cavity Optomechanical Oscillators for Wireless and Optical Communications

Turker Beyazoglu
Clark T.-C. Nguyen
Ming C. Wu
Liwei Lin
2016
Recent advancements in micro-optical and micro-mechanical resonator technologies haveallowed researchers to exploit coupling between the optical field and mechanical motionin an optical cavity to affect cooling or amplification of mechanical motion. Cooling the mechanical motion of microscale objects has been of high scientific interest, since it facilitates observation and exploration of certain quantum phenomena, e.g., the standard quantum limit of detection. On the other hand, amplification of the mechanical motion...

Highly Scalable Silicon Photonic Switches Based on Waveguide Crossbar with Movable Waveguide Couplers

Sangyoon Han
Ming C. Wu
Richard S. Muller
Liwei Lin
2016
Fast optical-circuit-switches (OCS) having a large number of ports can significantly enhance the performance and the efficiency of modern data centers by actively rearranging network patternsCommercially available optical switches typically operate with the use of moving mirror arrays. These switches can have port...

HexSil Micro Disk Drive Arm

Roel Dieron
Albert P. Pisano
Roberto Horowitz
1996

The mechanical properties of a novel material is characterized as part of the current effort to develop an integrated micro disk drive arm using mold micro-machining technology. A theoretical and finite element model of HexSil, a sandwich panel like material with hexago...

Fabrication and Characterization of Gecko-inspired Fibrillar Adhesive

Yongkwan Kim
Roya Maboudian
David B. Graves
Ali Javey
2014
Over the last decade, geckos remarkable ability to stick to and climb surfaces found in nature has motivated a wide range of scientific interest in engineering gecko-mimetic surface for various adhesive and high friction applications. The high adhesion and friction of its pads have been attributed to a complex array of hairy structures, which maximize surface area for van der Waals interaction between the toes and the count...

Fabrication Of Ultra Thick Ferromagnetic Structures In Silicon

Debbie G. Jones
Albert P. Pisano
Seth Sanders
2004

A novel fabrication process has been developed to create ultra thick ferromagnetic structures in silicon. The structures are fabricated by electroforming NiFe into silicon templates patterned with deep reactive ion etching(DRIE). Thin films are deposited into photoresist molds for...

Fatigue of Polycrystilline Silicon in MEMS Devices

Angela S. Choy
Kyriakos Komvopoulos
Albert P. Pisano
Roger T. Howe
1999

A clear understanding of the mechanical properties of the structural materials used in MEMS devices is critical in the design and reliability analysis of these devices. However, it cannot be assumed that macroscale and microscale devices have the same behavior. Macroscale fatigue mathods cannot accurately predict the behavior of microscale devices because at microscale sizes, the structure size is on the same order of magnitude as the grain size of the material. Also, grain boundaries, environmental, and facrications effects, which are negligible on the macroscale, may be significant on...