Publications

The functionality of traditional electromechanical systems can be fulfilled by micromachined sensors with intern electronics while offering several orders of magnitude size and cost reduction. This work presents a micromachined two input axis angular ...

Hard disk drive track widths of 1 um are needed to achieve 10 GBit/in^2. Since it is desired to keep the tracking error below an eigth of the track width, the magnetic hard disk drive servo must maintain the tracking error below 0.12um at the above track width. In a low disturbance environment, some hard disk drive manufactures believe that they can achieve this tracking error accuracy without the addition of new sensors and/or actuators. However, conventional hard disk drives are used in a wide variety of environemtns which subject them to a significant amount of shock and vibrations....

A low-cost, SOI-based, fully integrated fabrication process for high-aspect-ratio MEMS has been developed and demonstrated. The fully integrated SOI MEMS process uses only two MEMS masking steps plus a standard foundry CMOS process to form sensors and actuators with on-chip electronics. The test vehicle for this process was a 50um tall, in-plane, linear accelerometer with sigma-delta force balanced, capacitive sense electronics. The accelerometer had 25uG/Hz noise floor and +/- 1.75 G full range.

Using a modular process approach, fully integrated MEMS devices...