Publications

The design, fabrication and testing of electrostatically drive, high-sensitivity dc voltmeters (ESVs), which have demonstrated sensitivity to 10 mV signals is presented in this report. The ESVs have a micromachined test electrode (third layer of polysilicon) 5 um above the shutter, which provides testing repeatability, increased sensitviy to the input and most importantly the ability to accurately model ESV performance. The theoretical first- and second-harmonic output currents are derived. The results of predicted and experimentally meausred signals are compared and show the validity of...

Resonant microactuators, such as electrostatic combdrives, have proven useful for many small amplitude actuation applications. However, there are a number of micropositioning applications that require a significantly larger travel range than the 10 pm typically achieved by electrostatic combdrives. In addition,...

In this report, the motion of two linked electrostatic comb drives and the corresponding displacement of the tip of a centrally mounted pointer is examined. Based on the Bulirsch-Stoer numerical method with modified midpoint...

Electronic and photonic integrated circuits use optics to overcome bottlenecks of microelectronics in bandwidth and power consumption. Silicon photonic devices such as optical modulators, filters, switches, and photodetectors have being developed for integration with electronics based on existing complementary metal-oxide-semiconductor (CMOS) circuits. An important building block of photonic devices is the optical microresonator.

On-chip whispering-gallery-mode optical resonators such as microdisks, microtoroids, and microrings have very small footprint, and thus...