Publications

Monolithic Wireless Transceiver Design

Filip Maksimovic
Kristofer S.J. Pister
Ali M. Niknejad
Stephen D. Glaser
2020

Recently, there has been an increasing push to make everything wireless. In contrast to high-performance cellular communication, where the demand for enormous quantities of data is skyrocketing, these small wireless sensor and actuator nodes require low power, low cost, and a high degree of system integration. A typical CMOS system-on-chip requires a number of off-chip components for proper operation, namely, a crystal oscillator to act as an accurate frequency reference, and an antenna. The primary goal of this thesis...

Magnetic Microactuators with Polysilicon Flexures

Jack William Judy
Richard S. Muller
Seth Sanders
1994

A novel microactuator technology that combines magnetic thin films with polysilicon flexural structures is described. Micromechanical structures, actuated by an off-chip magnetic field, are constructed in a batch-fabrication process that combines electroplatingwith conventional lithography, materials, and equipment. A microactuator consisting of a 400x(47-40)x7μm^3 rectangular plate of NiFe attached to a 400x(0.9-1.4)x2.25μm^3...

Magnetic Field Sensing Using Micromechanical Oscillators

Soner Sonmezoglu
David A. Horsley
Rajeevan Amirtharajah
Xiaoguang “Leo” Liu
2017
Lorentz force magnetic sensors based on micro-electromechanical system (MEMS) resonators, measuring the vector components of the magnetic field, have recently attracted substantial commercial interest in inertial navigation systems (INSs) and compasses for smartphones. Over the last decade, substantial research effort has focused on improving the magnetic field sensitivity and resolution of Lorentz force magnetic sensors relying on either amplitude modulation...

MEMS Hydrogel Sensors for pH and Glucose Measurements

Supone Manakasettharn
Albert P. Pisano
Liwei Lin
2008
A new formulation of a pHand a glucoseresponsive hydrogel was developed and then integrated into an interdigitated MEMS sensor. This new hydrogel was characterized for swelling response as well as for impedance response (resistance and capacitance) when used as both a pH and a glucose sensor. The standard pHresponsive hydrogel, which was a copolymer of 2hydroxyethyl methacrylate and...

Materials Science and Device Physics of 2-Dimensional Semiconductors

Hui Fang
Ali Javey
Ramamoorthy Ramesh
Junqiao Wu
Eli Yablonovitch
2014

Materials and device innovations are the keys to future technology revolution. For MOSFET scaling in particular, semiconductors with ultra-thin thickness on insulator platform is currently of great interest, due to the potential of integrating excellent channel materials with the industrially mature Si processing. Meanwhile, ultra-thin thickness also induces strong quantum confinement which in turn affect most of the material properties of these 2-dimensional (2-D) semiconductors, providing...

Microscale Phase Change of Fuels for MEMS Power Applications

Brenda Haendler
Albert P. Pisano
Dorian Liepmann
Daniel M. Kammen
2006
As portable electronics technology advances, systems are becoming smaller and more energy intensive. While batteries are currently the only commercial power source for these applications, work is being done to create liquid fuel based portable power packs. These systems would leverage the higher energy density (W-hr/l) and specific energy (W-hr/kg) of liquid hydrocarbon fuels over available battery chemistries. For micro engines and small fuels cells there are advantages to preheating and vaporizing the fuel ...

Microfluidic Technologies for Single Cell Analysis

Dino Di Carlo
Luke P. Lee
Jay T. Groves
Tejal A. Desai
2006
Analysis of single cells is important for a complete understanding of the heterogeneity that is present in cell behavior and function. Current single cell analysis methods provide high throughput information about labeled compounds within cells, but in most cases cannot follow the dynamic processes occurring in signaling pathways. New microfluidic methods have also been developed to assay fast timescale responses or create uniform environments to study cell behavior in a more quantitative manner....

Micro Chemical Vapor Deposition for the Synthesis of Nanomaterials

Qin Zhou
Liwei Lin
Albert P. Pisano
Ali Javey
2011

MEMS (Microelectromechanical Systems) technologies have enabled the construction of a micro chemical vapor deposition (μCVD) system for the synthesis of nanomaterials. By means of localized resistive heating via microheaters, unique capabilities of the μCVD systems have been utilized to synthesize carbon nanotubes and graphene in this work, including fast stabilization of temperature; rapid exchange of gas species; laminar gas flow due to small Reynolds number; small diffusion...

Metal Optics Based nanoLEDS: In Search of a Fast, Efficient, Nanoscale Light Emitter

Michael Eggleston
Ming C. Wu
Eli Yablonovitch
Xiang Zhang
2015
Since the invention of the laser, stimulated emission has been the de facto king of optical communication. Lasers can be directly modulated at rates as high as 50GHz, muchfaster than a typical solid statelightemitting diode(LED)that is limited by spontaneous emission to <1GHz. Unfortunately, lasers have a severe scaling problem; they require large cavities operated at high power to achieve efficient lasing. A properly...

Monolayer Transition Metal Dichalcogenide NanoLEDs: Towards High Speed and High Efficiency

Kevin Han
Ming C. Wu
Ali Javey
Feng Wang
2019
Onchip optical interconnects promise to drastically reduce energy consumption compared to electrical interconnects, which dominate power dissipation in modern integrated circuits (ICs)One key requirement is a lowpower, highefficiency, and highspeed nanoscale light source. However, existing IIIV semiconductor light sources face a high surface recombination velocity (SRV ~ 104–106cm/s...