Physical Sensors & Devices

Research that includes:

  • Silicon MEMS actuators: comb, electro-thermal, and plastic deformation
  • Precision electronic sensing and measurements of capacitive, frequency, and coulombic MEMS variables
  • Structures and architectures for gyroscopes, accelerometers, micro strain gauges for direct application to rigid structures e.g., steel, and levitated MEMS

BPNX1017: 3D Printing of Functional Materials

Xiru Fan
Said Eyyubov
Kai Zhang
Zhen Wang
2025

3D printing offers unprecedented control over the design and fabrication of functional materials with complex architectures. In this project, we focus on developing textured ceramic structures using advanced 3D printing techniques. By engineering the resin formulation and printing process, we aim to align ceramic grains along designed orientations, enabling anisotropic properties tailored for transducer applications. The study will reveal the processing–structure–property correlations of textured ceramics, demonstrating how controlled grain orientation alignment and microstructural...

BPNX1033: Multi-Objective Inverse Design of Impact Resistant Metamaterials Under Varying Strain Rates

Anish Satpati
Marco Maurizi
2025

This work pertains to the multi-objective inverse design of impact-resistant metamaterials under varying strain rates. Impact-resistant materials are desirable in a wide range of applications, such as sports, automobiles, military, and aircraft, to name a few. Existing literature deals with refining these structures by performing quasi-static finite element (FE) simulations and then verifying them experimentally, which is a time-consuming and expensive process. Moreover, beyond the low-velocity regime, quasi-static simulations are not representative of real-world dynamic...

BPNX1029: Multi-Mode Multi-Direction High-Resolution Tactile Haptics and Sensing Duo-Functional Device using Piezoelectric Metamaterial

Jiayan Zhang
2025

Texture sensing and feedback are critical milestones for unlocking truly dexterous robotics, advancing human-machine interaction, and enhancing teleoperation tasks. While existing systems utilizes pneumatics, vibration motors and other elementary methods to provide basic feedback, they lack the capability to translate data into rich, high-resolution haptic displays required to replicate the nuanced spectrum of human touch. Here, we aim to develop the first-ever fabrics capable of both high-fidelity contact sensing and reproducing touch experiences with the resolution and complexity of...

BPNX1014: Data-Driven Design of Metamaterials

Marco Maurizi
David Hahn
Anish Satpati
Desheng Yao
2025

The rapid development of additive manufacturing technologies has enabled the fabrication of truss metamaterials, i.e., a novel class of lightweight-yet-strong materials with engineered complex hierarchical structures. Manipulating the architecture over chemical composition dramatically expands the achievable materials design space, allowing to largely control the mechanical response of metamaterials. Despite the great advances made in this area, designing three-dimensional (3D) truss metamaterials under complex or extreme conditions with programmable response is still a...

BPNX1060: Wearable On-Skin Chemical Sensing (New Project)

Seung-Rok Kim
2025

We present a wearable platform for on-skin chemical sensing that enables continuous and real-time monitoring of metabolic activity. The device is designed to operate robustly during physical activities and under varying skin conditions, providing reliable measurements that may be useful for personalized health assessment.

Project is currently funded by: Industry Sponsored Research

BPNX1031: Scalable Infrared Photodetectors based on Large-Grain Tellurium Film

Hyong Min Kim
Naoki Higashitarumizu
Theodorus Jonathan Wijaya
2025

Tellurium is a narrow-gap, p-type semiconductor with promising potential for future electronic and optoelectronic devices. Te’s band gap can be tuned from 0.31 eV in bulk form to 1.04 eV in monolayer form. Unlike many other competing 2D semiconductors, Te is air-stable and can be deposited on a substrate of choice by thermal evaporation or solution synthesis. Photodetectors based on solution-synthesized Te nanoflakes have already been demonstrated, with specific detectivity in near-IR at or above 10^9 Jones. However, solution-synthesis of Te nanoflakes is not scalable, and...

BPN972: Temperature-Insensitive Resonant Strain Sensor

Xintian Liu
Kevin H. Zheng
Neil Chen
2025

Explore the ultimate capability of a vibrating ring-based electrical stiffness-based resonant strain sensor, rigorously confirming a superior insensitivity to temperature that should permit it to operate under wide temperature excursions, such as experienced in harsh automotive environments.

Project currently funded by: Industry Sponsored

BPN999: Wearable Sweat Sensors with High-Throughput Fabrication

Seung-Rok Kim
Noelle Davis
Pooja Mehta
Amanda King
Yullim Lee
Nicole Qing
2025

We have been developing sweat sensors to analyze physiological and metabolic health information, such as sweat rate, glucose levels, pH, and various electrolytes, from any surface on the body surface where sweat glands are present. However, the stiff sweat sensors developed so far struggle to detect subtle signal changes, especially on soft skin. This is due to a mechanical mismatch between the rigid sweat sensor and the pliable skin, which can lead to motion artifacts and delamination of the patch from skin. Specifically, the stiff sensor cannot easily stretch along with the...

BPN743: Highly Responsive pMUTs

Peggy Tsao
Megan Teng
Hanxiao Liu
Yande Peng
2025

Ultrasonics has been realized as a nondestructive measurement method for a variety of
applications, such as medical imaging, healthcare monitoring, structural testing, range finding, and motion sensing. Furthermore, high intensity ultrasound can be used in therapeutic treatments, such as lithotripsy for kidney stone comminution, hyperthermia for cancer therapy, high-intensity focused ultrasound (HIFU) for laparoscopic surgery and transcranial sonothrombolysis for brain stroke treatment. MEMS ultrasonic transducers are known to have several pronounced advantages over the conventional...

BPN997: Interface Piezoelectricity-Induced Superconducting Qubit Decoherence

Kerry Yu
Haoxin Zhou
Kadircan Godeneli
Zihuai Zhang
Mutasem Odeh
Shahin Jahanbani
2025

Achieving high-performance quantum computing with superconducting qubits requires a good understanding of the various loss mechanisms that can degrade qubit performance. One such potential loss mechanism is undesired electromechanical coupling mediated by piezoelectric effects. It can occur even in centrosymmetric materials due to interface symmetry breaking. In our recent cryogenic microwave transmission measurements, we observed such interface piezoelectricity at the aluminum-silicon and aluminum-sapphire heterostructures, a widely used material combination in superconducting qubit...