Physical Sensors & Devices

Research that includes:

  • Silicon MEMS actuators: comb, electro-thermal, and plastic deformation
  • Precision electronic sensing and measurements of capacitive, frequency, and coulombic MEMS variables
  • Structures and architectures for gyroscopes, accelerometers, micro strain gauges for direct application to rigid structures e.g., steel, and levitated MEMS

BPN743: Highly Responsive pMUTs

Peggy Tsao
Megan Teng
Hanxiao Liu
Yande Peng
2025

Ultrasonics has been realized as a nondestructive measurement method for a variety of
applications, such as medical imaging, healthcare monitoring, structural testing, range finding, and motion sensing. Furthermore, high intensity ultrasound can be used in therapeutic treatments, such as lithotripsy for kidney stone comminution, hyperthermia for cancer therapy, high-intensity focused ultrasound (HIFU) for laparoscopic surgery and transcranial sonothrombolysis for brain stroke treatment. MEMS ultrasonic transducers are known to have several pronounced advantages over the conventional...

BPN961: Integrated Photonics for Scalable Trapped Ion Quantum Computing

Daniel Klawson
Yiyang Zhi
Arkadev Roy
Rohan Kumar
2025

Photonic integrated circuits (PICs) play a pivotal role in scaling trapped ion quantum systems. However, current quantum PICs suffer from low ion densities. We present a novel quantum PIC for individual optical control of closely-spaced trapped ion qubits. Our device achieves effectively achromatic beam focusing from 405 nm to 810 nm (and beyond) via a planar waveguide lens and a 3D-printed biconic mirror. Moreover, we have measured 30 dB crosstalk at a 5 µm pitch for the 532 nm and 729 nm barium and calcium gate wavelengths, surpassing the state-of-the-art. Finally, our monolithic surface...

BPNX1033: Multi-Objective Inverse Design of Impact Resistant Metamaterials Under Varying Strain Rates (New Project)

Anish Satpati
Marco Maurizi
2025

This work pertains to the multi-objective inverse design of impact-resistant metamaterials under varying strain rates. Impact-resistant materials are desirable in a wide range of applications, such as sports, automobiles, military, and aircraft, to name a few. Existing literature deals with refining these structures by performing quasi-static finite element (FE) simulations and then verifying them experimentally, which is a time-consuming and expensive process. Moreover, beyond the low-velocity regime, quasi-static simulations are not representative of real-world dynamic...

BPN915: Control of Microrobots with Reinforcement Learning

Yichen Liu
Kesava Viswanadha
Zhongyu Li
Emily Tan
Nelson Lojo
Derrick Han Sun
Aviral Mishra
Rushil Desai
2025

Developing task schedulers and low-level end-to-end controllers for microrobots operating in complex environments often demands extensive system and environment knowledge, leading to prolonged design cycles for specialized controllers. To expedite the generation of general controllers without requiring domain-specific expertise, we propose utilizing model-based reinforcement learning (MBRL) trained within simulated environments. Our research advances microrobot control through two key approaches: modeling the long-term dynamics of robots and distilling computationally intensive model...

BPNX1027: Electronic-Photonic Ultrasound Receiver Array for Endoscopic Applications

Sarika Madhvapathy
Ali M. Niknejad
Vladimir Stojanović
2025

Endoscopic ultrasound imaging systems require compact, low-power probes with a dense array of sensing elements. At the same time, the cabling inside the probe tube that interfaces with the external processing unit should be minimal. State-of-the-art ultrasound imagers that utilize CMUTs and PMUTs require integrating each transducer’s power-hungry analog frontend on probe, making it more difficult to satisfy the safe power limit. To address this, we propose the use of silicon microring resonators (MRRs) as ultrasound sensors. Their small element size (10-20 μm in diameter) allows us to...

BPNX1024: Reusable Sweat Rate Sensor

Seung-Rok Kim
Yifei Zhan
Noelle Davis
Suhrith Bellamkonda
2025

Sweat rate can provide the precautious signal of hyperhidrosis, hypohidrosis, and autonomic dysfunction. Currently, microfluidic and hygrometer-based sweat rate sensors are two types of available real-time sweat rate sensors. However, microfluidic device has issues of low temporal resolution, limited volume capacity, and surrounding artifact dependencies, while hygrometer-based devices also has overfilling and environmental artifact issues. In this work, we present reusable sweat rate sensor for continuous monitoring of sweat rate with novel sensor design.

Project...

BPNX1031: Scalable Infrared Photodetectors based on Large-Grain Tellurium Film

Hyong Min Kim
Naoki Higashitarumizu
2025

Tellurium is a narrow-gap, p-type semiconductor with promising potential for future electronic and optoelectronic devices. Te’s band gap can be tuned from 0.31 eV in bulk form to 1.04 eV in monolayer form. Unlike many other competing 2D semiconductors, Te is air-stable and can be deposited on a substrate of choice by thermal evaporation or solution synthesis. Photodetectors based on solution-synthesized Te nanoflakes have already been demonstrated, with specific detectivity in near-IR at or above 10^9 Jones. However, solution-synthesis of Te nanoflakes is not scalable, and...

BPNX1019: 3D Printing of Piezoelectric Materials and their US Transducers & Sensor Applications

Haotian Lu
Victor Couedel
2024

The performance of ultrasonic transducers is largely determined by the piezoelectric properties and geometries of their active elements. Due to the brittle nature of piezoceramics, existing processing tools for piezoelectric elements only achieve simple geometries, including flat disks, cylinders, cubes and rings. While advances in additive manufacturing give rise to free-form fabrication of piezoceramics, the resultant transducers suffer from high porosity, weak piezoelectric responses, and limited geometrical flexibility. We introduce optimized piezoceramic printing and...

BPN973: Piezoresistive Cement Paste for Structural Health Monitoring

Stuart McElhany
Anushree Konwar
Hung Vo
2025

Concrete is the most widely used engineered material in the world and finds use in nearly every aspect of civil infrastructure. Safety concerns posed by the aging of infrastructure combined with the prevalence of concrete in these systems highlights the demand for a concrete-composite capable of structural health monitoring (SHM) while being low-cost and easily implementable. Embedment of electrically conductive forms of carbon such as graphitic fibers and nanotubes allow for concrete and other cementitious composites to act as self-sensors capable of SHM through a...

BPN955: AI-Powered Life-Science Monitoring Platforms

Declan M. Fitzgerald
Nikita Lukhanin
Keming Bai
Kamyar Behrouzi
2025

Access to affordable and user-friendly health-science monitoring platforms are crucial for advancing global healthcare. While lateral flow immunoassays have been the primary solution for decades, their limited sensitivity and suboptimal sample utilization present challenges. This project represents a systematic progression towards developing economically viable sensors with heightened sensitivity, applicable to both disease diagnostics and the detection of environmental contaminants. By integrating nanoplasmonics to induce visually perceptible signals and harnessing the coffee ring effect...