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The research interests of Dr. Sedky focus on low thermal budget techniques for integrating MEMS monolithically with driving and sensing electronics, in addition to the design, modeling, fabrication and characterization of MEMS/NEMS devices. He holds six patents and authored or coauthored over sixty international publications and a book chapter in the field of design, fabrication and monolithic integration of MEMS with...

High temperature smart sensors are needed in propulsion, power instrumentation and space exploration to enable optimized fuel efficiency, reduced emissions, and improved safety. The ability to use electronic sensing systems at temperatures as high as 600C would not only enable new products, but would also decrease costs of current systems by eliminating large heavy complex cooling provisions; reliability would be improved by reducing...

With quality factors (Q) often-exceeding 10,000, vibrating micromechanical resonators have emerged as leading candidates for on-chip versions of high-Q resonators used in wireless communications systems. However, as in the case for transistors, extending the frequency of MEMS resonators generally entails scaling of resonator dimensions. Unfortunately, smaller size often coincides with lower-power handling capability and increased...

Highly sensitive magnetoresistive (MR) sensors were integrated together with MEMS resonators to achieve two important goals: to improve the magnetoresistive sensor static field sensitivity down to the picoTesla range, and to provide on-chip magnetic detection of resonance in MEMS. This MR-MEMS hybrid device enhances the static magnetic field sensitivity of the MR sensor through the cancellation of its 1/f noise. By using high...