NanoTechnology: Materials, Processes & Devices

Research that includes:

  • Development of nanostructure fabrication technology
  • Nanomagnetics, Microphotonics
  • CMOS Integrated Nanowires/Nanotubes (CMOS-Inn)

BPNX1023: CMOS-Compatible Doping of 2D Semiconductors

Inha Kim
Kyuho Lee
Dorottya Urmossy
Naoki Higashitarumizu
2025

2D materials are among the most promising candidates for next-generation semiconductor devices due to their exceptional electronic transport properties and composition of a single atomic layer, which offers significant advantages for integration density. However, high contact resistance and challenges in doping present obstacles to their practical applications. In this work, we aim to explore various methods to overcome these issues and achieve technological breakthroughs that will enable these materials to become integral components in a wide range of applications.

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BPN995: Growth of Metal Organic Framework (MOF) Crystals under Microgravity and their Prospects for Chemical Sensing

YoungJun Kim
Yaprak Ozbakir
HyoJun Min
Carlo Carraro
Liam McDonough
Sai Munagavalasa
Pat Taedullayasatit
2025

Metal-organic frameworks (MOFs) are porous, high surface area materials that consist of metal-cluster nodes connected by organic linkers to form highly ordered structures with various pore geometries and chemical properties. Due to their unique and tunable structure, MOFs have shown substantial promise in a broad range of applications, including chemical sensing, gas adsorption and separation, and catalysis. To investigate the intrinsic properties of MOFs for their sensing performance, single crystals are ideal platforms that mitigate the impact of defects, impurities, and grain...

Lukasz Komza

Graduate Student Researcher
Physics
Professor Alp Sipahigil (Advisor)
Ph.D. 2026 (Anticipated)

Lukasz Komza is a Physics PhD student at the University of California, Berkeley. He started working with Alp Sipahigil in the Quantum Devices Group in 2021 on the characterization and integration of silicon qubits in photonics. Prior to starting his PhD, Lukasz interned at Bell Labs in Murray Hill, NJ, working with Michael Eggleston on optical coherence tomography. He studied quantum light sources in 2D materials with Stefan Strauf during his undergraduate education, where he received the Alfred M. Mayer prize.

Synergistic Effects of Pd Single Atoms and Nanoclusters Boosting SnO2 Gas Sensing Performance

Yaprak Ozbakir
Yong Xia
Aifei Pan
Jiyun Hong
Jorge E. Perez-Aguilar
Simon R. Bare
Francesca Rossi
Rohan Dhall
Afnan Ali Alghannam
Nishit Goel
Stephen Bart
Carlo Carraro
Roya Maboudian
2025

Tin (IV) oxide-supported Pd is a promising heterogenous catalyst for CO oxidation relevant for environmental cleanup reactions. In this study, atomically dispersed catalyst Pd on SnO2 (ADC Pd/SnO2) hybrid material is successfully synthesized via a straightforward wet chemistry method and is found to exhibit superior performance toward CO sensing. Ex-situ EXAFS analysis confirms the formation of single Pd atoms and small Pd nanoclusters stabilized on the SnO2(110) surface. The material exhibits high efficiency in generating adsorbed O2– as well as high activity in catalyzing CO oxidation at...

Subtractive Microfluidics in CMOS

Wei-Yang Weng
Alexander Di
Xiang Zhang
Ya-Chen (Justine) Tsai
Yan-Ting Hsiao
Jun-Chau Chien
2024

This paper introduces a microfluidics platform embedded within a silicon chip implemented in CMOS technology. The platform utilizes a one-step wet etching method to create fluidic channels by selectively removing CMOS back-end-of-line (BEOL) routing metals. We term our technique “subtractive” microfluidics, to complement those fabricated with additive manufacturing. Three types of structures are presented in a TSMC I80-nm CMOS chip: (1) passive microfluidics in the form of a micro-mixer and a 1: 64 splitter, (2) fluidic channels with embedded ion-sensitive field-effect transistors (ISFETs...

BPNX1006: Quantitative Optical Characterization of Indium Selenide

Jamie Geng
2024

Bulk gamma-InSe has a direct bandgap of 1.24 eV, which corresponds to near infrared (NIR) wavelengths (λ = 1.0 µm) useful in optoelectronic applications from biometric detectors to silicon photonics. However, its potential for optoelectronic applications is largely untapped due in part to the lack of quantitative studies of its optical properties. Here, we study the unusually low absorptance and high photoluminescence quantum efficiency of single-crystalline InSe flakes with thickness in the hundreds of nanometers. InSe emits brightly at room temperature from its direct bandgap with a peak...

Hyong Min Kim

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Ali Javey (Advisor)
Ph.D. 2028 (Anticipated)

Hyong is a Ph.D. student in the Electrical Engineering and Computer Sciences Department at University of California, Berkeley. He received his Bachelor's Degree in Electrical Engineering from the Univeristy of Pennsylvania in 2023. In his undergraduate research, Hyong studied quantum emission from strained 2D materials, ferroelectric field-emission transistors based on AlScN/2D material heterostructures, and scanning probe characterization of 1D-2D material interfaces. Hyong's current research at Berkeley is on fabricating next-generation Mid-Wave Infrared (MWIR) optoelectronic devices...

Dehui Zhang

Postdoctoral Researcher
Electrical Engineering and Computer Sciences
Professor Ali Javey (Advisor)

Dehui Zhang is a postdoctoral researcher in Electrical Electrical Engineering and Computer Sciences at the University of California, Berkeley, a postdoctoral researcher at Berkeley Sensor & Actuator Center (BSAC), and a research affiliate in the Materials Science Division at Lawrence Berkeley National Laboratory. He received a Ph.D. in Electrical and Computer Engineering from University of Michigan, Ann Arbor in 2021, and was a postdoctoral researcher at University of California, Los Angeles in 2021-2023. Dehui Zhang joined Javey Research Group in September 2023...

BPNX1003: Copolymer-Template Fabrication of Metal Oxides with Tailored Porosity toward High-performance Gas Sensors

YoungJun Kim
HyoJun Min
Tzu-Chiao Wei
Yaprak Ozbakir
Carlo Carraro
2025

Metal oxide semiconductors (MOX) such as SnO2 are widely used in chemiresistive gas sensors due to their high chemical and thermal stability, low cost, and tunable chemical and electronic properties. The introduction of porosity to the MOX structure enhances their gas-sensing properties by increasing the surface area available for interactions with gas molecules. This higher surface area enhances the sensor's sensitivity by providing more active sites for gas adsorption. Also, a faster response/recovery time can be obtained as gas molecules can more quickly interact with a...

BPNX1002: Atomically Dispersed Metals on Graphene Oxide for High-Performance Electrochemical Biosensors

Yaprak Ozbakir
HyoJun Min
2025

Atomically dispersed metal catalysts have garnered considerable attention due to their unique properties and superior catalytic activity. The isolation of metal atoms on the matrix offers enhanced catalytic performance even with a small content of noble metal loading. This class of materials provides exciting opportunities to improve the performance of chemical and biochemical sensors. In this work, we have selected Pd as the catalysts because of its high catalytic activity and graphene oxide as the matrix because of its high electrical conductivity and unique electrochemical properties....