Ming C. Wu (Advisor)

Research Advised by Professor Ming C. Wu

Pick and Place Silicon on Insulator Microassembly

Matthew Last
Kristofer S.J. Pister
Ming C. Wu
Liwei Lin
2005
Deep reactive ion etching into Silicon on Insulator (SOI) wafers is a popular method of fabricating high-performance MEMS devices. These include electrostatic and thermal actuators, flexures that guide very precise motion, and ultra-flat and smooth reflectors to make micro-mirrors. An important limitation of SOI-based MEMS is that it is not easy to achieve a large range of out-of-plane motion without a complex fabrication process. This is because of the difficulty in...

Chao-Hsi Josh Chi

Alumni
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2006

Tunable Optical Microresonators with Micro-Electro-Mechanical-System (MEMS) Integration

Jin Yao
Ming C. Wu
2007

Optical microresonators are key enabling elements for many photonic integrated circuits (PICs) areas. Their applications include modulators, optical filters, optical delay lines, nonlinear optical devices, and optical sensors. In previous demonstrations, the coupling of the resonator and its input/output is generally fixed, or tuned using non- integrated alignment system. The ability to control and vary the optical coupling is highly desirable in the areas of emerging adaptive optical circuits as well as in ultra-compact tunable, switchable, and reconfigurable optical components and...

Jin Yao

Alumni
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2007

Oxygen Concentration Microgradients for Cell Culture

Jaehyun Park
Michel M. Maharbiz
Ming C. Wu
Amy E. Herr
2010

There is a growing need for technology that can control microscale oxygen gradients onto a tissue or culture sample in vitro. This dissertation introduces the oxygen microgradient chip (OMA), which employs electrolysis to generate oxygen microgradients within cell culture without forming bubbles. Dissolved oxygen generated at noble microelectrodes patterned on a chip surface diffuses through a gas-permeable silicone membrane and is dosed into cell culture. The amount of generated oxygen is directly proportional to a current flowing across the electrodes and thus can be controlled...

Justin Valley

Alumni
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2011

Light-induced Electrokinetics: A path to a Versatile Micro Total Analysis System

Justin Valley
Ming C. Wu
Michel M. Maharbiz
Amy E. Herr
2011

The micro total analysis system (uTAS) has seen great interest and advances since its definition over two decades ago. By harnessing the fabrication tools of the semiconductor industry and exploiting the unique physical phenomena that dominate at the micro- to nano-scale, these devices aim to address applications ranging from point-of-care diagnostics to pharmaceutical development. A truly versatile uTAS technology platform will enable reconfigurable, parallel, and high resolution analysis, processing, and sorting/purification. To this end, we present the concept of light-induced...

Amit Lakhani

Alumni
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2012

High Resolution Additive Patterning of Nanoparticles and Polymers Enabled by Vapor Permeable Polymer Templates

Michael Demko
Alberto P. Pisano
Liwei Lin
Ming C. Wu
2012
The structure and chemistry of nanoparticles and polymers are interesting for applications in electronics and sensors. However, because they are outside of the standard material set typically used for these applications, widespread use of these materials has not yet been realized. This is due in part to the limited ability of traditional manufacturing processes to adapt to these unique materials. As a result, several alternative manufacturing methods have been developed, including nanoimprint lithography,...

Jeffrey Chou

Alumni
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2012