Electro Micro-Metrology (EMM) is a novel methodology for precision metrology, sensing, and actuation at the micro- and nano-scale. EMM is well-suited for tiny technology because it leverages off the electromechanical benefits of the scale. EMM is the method of using micro- or nano-scale devices to measure and characterize themselves, other devices, or whatever the devices subsequently interact with. By electronically measuring the change in capacitance, change in voltage, and/or resonant frequency of just a...
