Liwei Lin (Advisor)

Research Advised by Professor Liwei Lin

Lin Group:  List of Projects | List of Researchers

Chip-scale Lidar

Behnam Behroozpour Baghmisheh
Bernhard E. Boser
Ming C. Wu
Liwei Lin
2017

The superiority of lidar compared to radiofrequency and ultrasonic solutions in terms of depth and lateral resolution has been known for decades. In recent years, both application pull such as 3D vision for robotics, rapid prototyping, selfdriving cars, and medical diagnostics, as well as technology developments such as integrated optics and tunable lasers have resulted in new activities

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Carbon Nanotube-based MEMS Energy Storage Devices

Yingqi Jiang
Liwei Lin
Albert P. Pisano
Constance Chang-Hasnain
2011
Carbon nanotube (CNT) forests have been utilized as electrodes in supercapacitors in this work for energy storage applications. High surface area to volume ratio, good electrical conductivity, and low contact resistance to a bottom metal electrode make CNT forests attractive as electrodes in supercapacitors. Several approaches have been investigated to improve the performances such as configurations, power and energy density of CNT-based supercapacitors, including the single layer architecture by utilizing...

A Multi-Stage Micro-Tangential Flow Filtration System for BioMEMS Applications

Patrick Pak-Ho Leung
Dorian Liepmann
Luke P. Lee
Liwei Lin
2002

The micromachining technology that emerged in the 1980s has yielded an explosion of developments of micro electromeclianica1 systems (MEMS) in the past two decades. The developments have brought lives to many miniaturized sensors and...

A MEMS Thin Film AlN Supercritical Carbon Dioxide Valve

Ya-Mei Chen
Albert P. Pisano
Liwei Lin
Tsu-Jae King Liu
Tarek Zohdi
2011
In this thesis, a new piezoelectric valve system with bi-chevron aluminum nitride (AlN) actuator is described. The intended application of the new piezoelectric valve is for the advanced printing technology with supercritical carbon dioxide as the solvent. With supercritical carbon dioxide as the solvent, the ink dissolved will start to nucleate with a micronozzle and generate extremely small and uniform ink particles due to rapid expansion of supercritical...

Selective Encapsulations of MEMS: Micro Channels, Needles, Resonators and Electromechanical Filters

Liwei Lin
Albert P. Pisano
Roger T. Howe
Van P. Carey
1993
Surface and combined surface/bulk micromachining techniques are developed for selectively encapsulated micro devices including micro flow channels, micro hypodermic needles, hermetically sealed lateral micro resonators and electromechanical filters. As part of...

Water-Powered Microfluidic Devices for Diagnostic and Drug Delivery Systems

Yu-Chuan Su
Liwei Lin
Albert P. Pisano
Luke P. Lee
2003
This dissertation presents the development of water-powered microfluidic devices, including actuators, pumps, pressure-sensitive valves, and flow discretizers, by integrating osmosis, capillarity, microfabrication, and polymer processing technologies at the microscale. By harvesting and coordinating the mechanical actuations driven by chemical potentials and interfacial forces, these water-powered devices can transport flows in pre-...

Electromagnetic Effects in MEMS Application: Actuators, Relay and Packaging

Andrew Cao
Liwei Lin
Albert P. Pisano
Luke P. Lee
2004
Two electromagnetic effects are utilized in MEMS applications: electromagnetic Lorentz force for bidirectional actuator/relay operations, and electromagnetic induction heating for MEMS bonding and packaging processes. As a proofofconcept demonstration, a liquidmetal wetted contact process is developed to reduce the contact resistance in MEMS relay applications. Electromagnetic Lorenz force is utilized to control the actuation direction of bi...

MEMS Microbial Fuel Cells and Photosynthetic Electrochemical Cells

Kien-Bang Lam
Liwei Lin
Albert P. Pisano
Kevin E. Healy
2005
In this dissertation, we present three MEMS (Micro-electro-mechanical Systems) biological electrochemical cells: (1) a microbial fuel cell (μMFC) utilizing glucose as the bio-fuel and live baker’s yeast as the bio-catalyst; (2) a photosynthetic electrochemical cell (μPEC1) based on unicellular bacteria Anabaena as the biological photo-electrical converter; and (3) a second photosynthetic electrochemical cell (μPEC2)...

Silicon Processed Microstructures Using Self-Aligned Plastic Deformation

Jongbaeg Kim
Liwei Lin
Albert P. Pisano
Luke P. Lee
2004

Two self-aligend plastic deformation processes are devleoped to fabricate silicon microstructures, including angular vertical comb-drives, scanning micromirrors, variable capacitors, and two-axial actuators based on global-furnace and localized-Joule heating methods. As a proof-of-concept demonstration, an ultrasonic packaging procedure that generates local plastic deformation of metallic bonding materials is also established for MEMS packaging applications.

Plastic defomation of silicon occurs at elevated temperature when silicon is stresses to a level higher than the reduced yield...

Piezoelectric Aluminum Nitride Vibrating RF MEMS for Radio Front-End Technology

Gianluca Piazza
Albert P. Pisano
Roger T. Howe
Liwei Lin
Kristofer S.J. Pister
2005
The demand of consumer electronics for RF filters and frequency reference elements has focused attention on the reduction of size, power consumption and price and pushed current research interests towards the manufacturing of a single-chip, integrated RF solution. Vibrating contour-mode MEMS resonators constitute the most promising technology for ultimately realizing this vision. This dissertation presents analytical and experimental results on a new class...