Bernhard Boser (Advisor)

Adaptive Control Strategies for MEMS Gyroscopes

Sungsu Park
Roberto Horowitz
Roger T. Howe
Bernhard E. Boser
This dissertation presents adaptive control strategies for MEMS z-axis gyroscopes. Specifically, a unified methodology is proposed for designing and analyzing the performance of control algorithms that can identify and, in an adaptive fashion, compensate for most fabrication defects...

A CMOS Magnetic Sensor Chip for Biomedical Applications

Peng Liu
Bernhard E. Boser
Seth Sanders
Yuri Suzuki

The growing need for pointofcare applications in global health and personalized medicine motivates a significant reduction in the size and cost of present technologies. Current solutions use fluorescent or enzymatic labels with complex optical instrumentation that has proven difficult to miniaturize. Recently, magnetic bead labeling has emerged as an alternative solution enabling portable and low...

A High-Voltage Charge Pump in Bulk CMOS

Eugene Lau Cheung
Bernhard Boser
Albert P. Pisano

The goal of this project is to investigate a circuit for generating 80V in a bulk CMOS technology. This voltage is needed for powering a micromachined electrostatic actuator, and it must be generated from a 5V ...

BPN421: Pipelined ADC Utilizing Passive Inter-stage Gain

Yida Duan

To meet demands for mobile electronic, power has become limiting factor for most ADC design. In pipelined ADC structure, Inter-stage Gain circuits are the most power hungry building block. Conventionally, Inter-stage gain circuits are implemented using feedback an OTA with a less-than-1 feedback factor (i.e. 1/2 to 1/3). This approach is costly because these OTAs drive not only the load capacitors, but also the sampling and feedback capacitors. As a result, the power consumption of these amplifiers is a feedback factor (i.e., 2 to 3X) worse than their counterparts in unity gain...

Capacitive Position-Sensing Interface for Micromachined Inertial Sensors

Xuesong Jiang
Bernhard E. Boser
Roger T. Howe
Roberto Horowitz

A monolithic MEMS/circuits technology enables the implementation of multiple sensors and more functions, such as sensing, signal processing and actuation, on a single chip. In this work, issues related to monolithic integration of micromachined inertial sensors, including accelerometers and gyroscopes, are investigated. Mechanical sensitivity, noise, and experimental performance verification of the open-loop accelerometer are discussed. The resolution of a position-sensing accelerometer can be improved by increasing the mechanical sensitivity and the accuracy of position measurement. 1¹G=...

BPN910: Frequency Modulated MEMS Gyroscopes with Extremely Small Errors

Burak Eminoglu

High-performance gyroscopes are key elements of inertial navigation systems. Miniaturization of these sensors is desirable to achieve low manufacturing cost, low weight, small size, and low energy consumption. Although miniaturized gyroscopes have been used in a wide range of applications such as gaming and image stabilization, their low performance prevents their implementation in inertial navigation systems. The main goal of this research is to identify, analyze, and characterize parameters that limit the performance of frequency-modulated (FM) gyroscopes and develop extremely high-...

BPN852: Frequency to Digital Converter for FM Gyroscopes

Burak Eminoglu

Frequency modulated (FM) gyroscopes are a new class of inertial sensors which measure the angular rotation rate. They offer several advantages including accurate scale factor, large dynamic range, and robust performance over temperature variation. The frequency of the output signal should be detected precisely to extract the slight frequency variations in the modulated signal. This research focuses on the design of high-resolution frequency to digital converters (FDC) for use as the interface circuit for FM gyroscopes. In particular, it is intended to optimize noise performance, dynamic...

High Performance FM Gyroscopes

Burak Eminoglu

MEMS gyroscopes are used in a wide range of applications such as gaming and image stabilization. However, the poor long-term stability of consumer MEMS gyroscopes precludes their use in demanding applications such as inertial navigation. Although devices with higher performance are available, they suffer from substantially higher power dissipation, size, and cost. For wider adoption it is imperative to find solutions that reduce drift without compromising the advantages of MEMS gyroscopes.

This thesis focuses on scale factor and bias stability. The scale factor of any sensor is set...