Albert P. Pisano (Advisor)

Silicon Electromechanical Microgrippers: Design, Fabrication, and Testing

Chang-Jin Kim
Albert P. Pisano
Richard S. Muller
1991
Microgrippers with jaw spans of l0um have been made from thin films (2um thick) of polycrystalline silicon (polysilicon) by using micromachining technology derived from IC-manufacturing methods. A 500um-long, on-wafer gripper, electrostatically driven by flexible-comb actuators, has been designed, fabricated,...

Impact Actuation of Polysilicon Micromechanical Structures

Abraham Lee
Albert P. Pisano
Roger T. Howe
1992
Impact on silicon? One may have the experience in dropping a silicon wafer on the floor, and shattering it to pieces. Or trying to dice a wafer by a diamond marker, and accidentally crunching the edges. These experiences may lead...

Abraham Lee

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1992

Wensyan Hsu

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1992

Reid Brennen

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1993

Micromachined Photonic Devices and Systems on Silicon

Michael Daneman
Kam Y. Lau
Richard S. Muller
Albert P. Pisano
1996
In this thesis we describe design, fabrication, and characterization of micromachined microphotonic systems on silicon. Surface-micromachining technology is used to produce movable optical components such as microreflectors and microgratings. Microhinges...

Per Ljung

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1997

Micromachined Gyroscope with Integrated Electronics

Per Ljung
Albert P. Pisano
Roger T. Howe
Andrew K. Packard
1997

The functionality of traditional electromechanical systems can be fulfilled by micromachined sensors with intern electronics while offering several orders of magnitude size and cost reduction. This work presents a micromachined two input axis angular ...

Don DeVoe

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1997

Thin Film Zinc Oxide Microsensors and Microactuators

Don DeVoe
Albert P. Pisano
Roger T. Howe
Tim Sands
1997
In this work, a variety of piezoelectric sensors and actuators utilizing zinc oxide (ZnO) thin films for electromechanical transduction are presented which rely on surface-micromachining technologies. Specifically, piezoelectric cantilever actuators, open loop accelerometers, and fixed-beam resonant structures are demonstrated using two novel...